[Article] A comparative study of the bonding energy in adhesive wafer bonding
F. Forsberg, F. Saharil, T. Haraldsson, N. Roxhed, G. Stemme, W. van der Wijngaart, F. NiklausAnnée:
2013
Langue:
english
Pages:
8
Fichier:
PDF, 1.28 MB
IPFS:
,
english, 2013